Ville Kaajakari, Practical MEMS: Analysis and design of microsystems, MEMS sensors, electronics, actuators, rf mems, optical mems, and microfluidic systems, Small Gear Publishing, 2009.

PhD Thesis

Ville Kaajakari, Ultrasonic Surface Micromachine Actuation. Applications to Release, Microstructure Assembly, and Micromotors, University of Wisconsin-Madison, 2002.

MS Thesis

Ville Kaajakari, Surface Micromachine Assembly Using Ultrasonic Substrate Vibrations, University of Wisconsin-Madison, 2001.

Practical MEMS book