• Tutorials
• MEMS books
• MEMS Links

Web-sites with educational material

The links below are to sites that have good MEMS tutorials. Let me know if you know of a good one!

• MEMS entry at Wikipedia is a good starting point for beginners.
• Introduction to microengineering by D. Banks - a good overview of fabrication techniques, sensors, and actuators.
• Introduction to MEMS design - a course web site at UC Berkeley.